Machine OctopusQuality used machinery from trusted brokers
Robotechnik Europe OPTIwet ST30 Wetbench-System
Specifications
Overview
Process Chamber
- Material
- PP (Polypropylene)
- Max wafer size
- 12 inch
- Max substrate size X/Y
- 9in/9in
- Programmable media arms
- 2
Rotation Specifications
- Rotational speed
- 1-4000 rpm
- Acceleration ramp
- 1-3000 rpm
- Spin time
- 1-999 seconds
Exhaust System
- Process bowl exhaust
- 2x DN110, approx. 200m³/h each
- Chamber exhaust
- 2x DN110, approx. 200m³/h each
- Housing exhaust
- 1x DN110, approx. 200m³/h
- Control exhaust
- 1x DN110, approx. 200m³/h
Gas Supply
- CDA (Compressed dry air)
- 8 ± 2 bar
- Vacuum
- -0.8 ± 0.2 bar
- Nitrogen
- 4.0 ± 0.5 bar
Drainage and Waste
- Media drains
- 3
- Waste box capacity
- 2 concentrate wastes
Accessories
- Reagent box
- With pressure vessel
- Thermostat baths
- 4 Julabo units
Interested in this machine?
Get in touch with the seller for pricing, additional photos, technical specifications, or to arrange a viewing.
Contact Seller
Know someone who might be interested?
Share this machine with colleagues or friends
Share this machine
AI Description
BetaCapabilities
The Robotechnik Europe OPTIwet ST30 is a standalone wet chemical processing system designed for precision cleaning, etching, and coating of semiconductor wafers up to 12 inches and substrates up to 9x9 inches. It features two programmable media arms with variable rotation speeds (1-4000 rpm) and customizable spin cycles (1-999 seconds), allowing controlled chemical processing with exhaust management through dual DN110 process bowls. The system includes a polypropylene process chamber, integrated waste management for two concentrate streams, and a pressurized reagent box for automated chemical dispensing.
Industries & Uses
This equipment is essential for semiconductor manufacturers, research laboratories, MEMS producers, and electronics manufacturers who need reliable wet processing capabilities. It's commonly used for wafer cleaning before critical manufacturing steps, photoresist removal, metal etching, and substrate preparation. The stand-alone design makes it suitable for cleanroom and production environments where space and process isolation are important.
What to Check When Buying
When evaluating a used unit, verify the condition of the PP chamber for chemical corrosion or cracks, inspect both media arm actuators for smooth operation, and request maintenance records documenting calibration of rotation speeds and pressure/vacuum systems. Check that all exhaust and drain connections are intact and that the waste management system has been properly maintained. Confirm proper functioning of the programmable controls and ask about chemical compatibility history to ensure it matches your intended applications.
This description is AI-generated and is intended as a general guide only. As with all AI-generated content, it may contain inaccuracies. Please verify all details directly with the seller before making a purchasing decision.
Interested in this machine?
Get in touch with the seller for pricing, additional photos, technical specifications, or to arrange a viewing.
Contact Seller
Similar Machines
More machines in Other machinery and plants
Know someone who might be interested?
Share this machine with colleagues, partners, or friends who might be looking for similar equipment.